Temperature uniformity on wafers
Omron's interacting PID control technology ensures that the temperature profile remains constant.
Challenge
Temperature uniformity is key to realize high thin-film quality for fine patterning. For 300mm wafers it's difficult to maintain certain heaters at the same profile, due to interference and disturbance.
|
|
Solution
Gradient Temperature Control (GTC), Omron's interacting PID control technology, ensures that a two-dimensional temperature profile remains constant over the defined area. GTC makes it possible to control the exact shape of the temperature profile at any position.
|
Benefit
Enables high process quality to be achieved, while reducing setting-up time.
|
|
