Heat resistant fiber sensor
Detect wafers stably in or near heated chambers up to 350 degrees.
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Challenge
In order to detect wafers in or near heated chambers, the sensor head has to be heat resistant.
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Solution
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Omron offers various heat resistant fiber sensors such as:
- Up to 350 degrees resistant for baking ovens
- Up to 200 degrees for high temperature IC handling and flexibility for bending (R10 mm)
- Up to 200 degrees for detect small objects at long distances (1300 mm) and with narrow beam.
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Benefit
Stable detection with fewer problems.
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