Wafer slide-out
Prevent a wafer slide-out with laser coaxial retro-reflective type sensors.
Challenge
A wafer slide-out event from a predetermined position can cause a crash between robot arm and wafers. For secure handling, a 'slide-out' wafer has to be detected and the detected edge position should be the same lengthways from the wafer bottom to top. Moreover, there isn't enough space to place sensors under the cassette.
|
|
Solution
Laser coaxial retro-reflective type enables each wafer to be detected at the same position lengthways without dispersion. It can detect even transparent glass wafers.
|
Benefit
Fewer problems with secure handling while saving space and wiring.
|
|
